Applied Materials Centura RTP TPCC–Sold
Asset # :
37345
Equipment Make:
Applied Materials
Equipment Model:
Centura RTP TPCC
Type:
Wafer Size:
Equipment Configuration:
-Wide Body Load Lock
– 3x Ch XE+ ATM
– HP Robot
– 2x Asyst LPT 2200 SMIF
– 2x SMC Chillers
– 1x Ebara AA 20 N Loadlock Pump
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Added: June 14, 2018
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Views: 487