KLA Tencor UV 1280 SE Film Thickness Measurement
Asset # :
128266
Equipment Make:
KLA-Tencor
Equipment Model:
UV 1280 SE
Type:
Film Thickness Measurement
Wafer Size:
8"
Equipment Configuration:
- Software: Summit 2.40.16
- CIM: SECS
- Robot Handler System
- Factory Interface: SMIF
- Pre-Aligner Handler
- 50/60 Hz
- 240V
1999 Vintage
- CIM: SECS
- Robot Handler System
- Factory Interface: SMIF
- Pre-Aligner Handler
- 50/60 Hz
- 240V
1999 Vintage
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Added: February 3, 2025
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Views: 14