Nikon SF 200 Scanner
Asset # :
125624
Equipment Make:
Nikon
Equipment Model:
SF 200
Type:
Scanner
Wafer Size:
8"
Equipment Configuration:
- Laser: Komatsu
- Resolution: 0.18um
- Wafer loader type: type 3, NC Pre2
- Reticle size: 6"
- Max expose field size: 26mm x 33mm
- Reticle library: Nikon standard (9 slot)
- PPD
- Bar code reader
- Alignment system: LSA, FIA
- Inline: Left in'line
- Chamber type: S61
2003 Vintage
- Resolution: 0.18um
- Wafer loader type: type 3, NC Pre2
- Reticle size: 6"
- Max expose field size: 26mm x 33mm
- Reticle library: Nikon standard (9 slot)
- PPD
- Bar code reader
- Alignment system: LSA, FIA
- Inline: Left in'line
- Chamber type: S61
2003 Vintage
Equipment Pictures:
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Added: November 20, 2024
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Views: 7