Hitachi S 8800 / S 8820 CD SEM
Asset # :
127148
Equipment Make:
Hitachi
Equipment Model:
S 8800 / S 8820
Type:
CD SEM
Wafer Size:
Equipment Configuration:
Hitachi S-8820
Hitachi S-8820
Missing Parts:
- TMP 1 (+ Control)
- TMP 2 (+ Control)
- Aligner (+ Control)
- EVAC Controller
- Stage Controller
- Robot Controller
- Linear Scale
- Motor Drive (X,Y)
- EVAC DC
- Air Valve (AV 3, AV 4, AV 5, AV 6, AV 8)
- Chuck Silender
- PCB (LENS, DEF, MHV, SEM DCPS)
- Pe Gaugue (2)
- Pi Gaugue
- Display: HV Controller, PCB (ECPU, CONGNEX, HCopy, IMEM, SIP, SGVA, OMAFC)
- Power
Hitachi S-8800
Missing Parts:
- TMP 1 (+ Control)
- TMP 2 (+ Control)
- Aligner (+ Control)
- EVAC Controller
- Stage Controller
- Robot Controller
- Linear Scale
- Motor Drive (X,Y)
- EVAC DC
- Air Valve (AV 3, AV 5, AV 6, AV 8)
- Chuck Silender
- PCB (DEF, MHV)
- Pe Gaugue (2)
- OM Lamp PW
- Exchange Robot
- Moveable Aperture
- Stage Motor X
- Display: HV Controller, PCB (SIP)
- Power
Hitachi S-8820
Missing Parts:
- TMP 1 (+ Control)
- TMP 2 (+ Control)
- Aligner (+ Control)
- EVAC Controller
- Stage Controller
- Robot Controller
- Linear Scale
- Motor Drive (X,Y)
- EVAC DC
- Air Valve (AV 3, AV 4, AV 5, AV 6, AV 8)
- Chuck Silender
- PCB (LENS, DEF, MHV, SEM DCPS)
- Pe Gaugue (2)
- Pi Gaugue
- Display: HV Controller, PCB (ECPU, CONGNEX, HCopy, IMEM, SIP, SGVA, OMAFC)
- Power
Hitachi S-8800
Missing Parts:
- TMP 1 (+ Control)
- TMP 2 (+ Control)
- Aligner (+ Control)
- EVAC Controller
- Stage Controller
- Robot Controller
- Linear Scale
- Motor Drive (X,Y)
- EVAC DC
- Air Valve (AV 3, AV 5, AV 6, AV 8)
- Chuck Silender
- PCB (DEF, MHV)
- Pe Gaugue (2)
- OM Lamp PW
- Exchange Robot
- Moveable Aperture
- Stage Motor X
- Display: HV Controller, PCB (SIP)
- Power
Equipment Pictures:
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Added: December 20, 2024
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Views: 9