VCR Group IBS / TM 200 S Ion Beam Sputter (IBS)
Asset # :
61771
Equipment Make:
VCR Group
Equipment Model:
IBS / TM 200 S
Type:
Ion Beam Sputter (IBS)
Wafer Size:
Equipment Configuration:
Equipped With:
- 200 l/s turbo-molecular pump
- Ion-beam gun
- Quartz crystal thickness monitor
- Four-position target carrier
- Liquid nitrogen cold trap
Electrical:
- Interlocked to prevent high voltage shock
- 110 V AC, 50/ 60 Hz, 15 A
- 220 V AC, 50/ 60 Hz, 10 A (Optional)
Mechanical:
- Weight: < 500 lbs
- Size: Approximate overall dimensions
- 50” H x 24” W x 32” D (chamber lid open)
- 40” H x 24” W x 32” D (chamber lid closed)
Utilities:
- Argon Gas Flow: 5-10 psi, 1.5 sccm, 99.999 % pure
- Nitrogen Gas Flow: Turbomolecular Pump bleed
- Water Flow: 30 GPH, clean water
- 200 l/s turbo-molecular pump
- Ion-beam gun
- Quartz crystal thickness monitor
- Four-position target carrier
- Liquid nitrogen cold trap
Electrical:
- Interlocked to prevent high voltage shock
- 110 V AC, 50/ 60 Hz, 15 A
- 220 V AC, 50/ 60 Hz, 10 A (Optional)
Mechanical:
- Weight: < 500 lbs
- Size: Approximate overall dimensions
- 50” H x 24” W x 32” D (chamber lid open)
- 40” H x 24” W x 32” D (chamber lid closed)
Utilities:
- Argon Gas Flow: 5-10 psi, 1.5 sccm, 99.999 % pure
- Nitrogen Gas Flow: Turbomolecular Pump bleed
- Water Flow: 30 GPH, clean water
Equipment Pictures:
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Added: November 21, 2024
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Views: 10