Nikon SF 130 i Line Stepper
Asset # :
125623
Equipment Make:
Nikon
Equipment Model:
SF 130
Type:
i-Line Stepper
Wafer Size:
Equipment Configuration:
- Operating System: Windows
With:
- Loader chamber
- Control rack
- Left & right chamber
- Temperature controller
- Piezo unit
- Slider unit
- Power supply
- Lamp house rack
- Back side frame
- Lamp cooling unit
- Top chamber
- Return duct
- Right & left upper frame
- Control rack plate
- FOUP
2004 Vintage
With:
- Loader chamber
- Control rack
- Left & right chamber
- Temperature controller
- Piezo unit
- Slider unit
- Power supply
- Lamp house rack
- Back side frame
- Lamp cooling unit
- Top chamber
- Return duct
- Right & left upper frame
- Control rack plate
- FOUP
2004 Vintage
Equipment Pictures:
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Added: November 20, 2024
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Views: 23