Axcelis NV GSD III
Asset # :
80375
Equipment Make:
Axcelis
Equipment Model:
NV GSD III
Type:
Wafer Size:
Equipment Configuration:
- LD: 1ea, outer, Asyst, 4ea original
- Gas: Ar, Arsenic, BF3, PH3
- OS: Solaris
Equipment Pictures:
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Added: August 19, 2024
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Views: 2