Lam 2300 V 2 Kiyo 45 Etcher
Asset # :
81888
Equipment Make:
Lam
Equipment Model:
2300 V 2 Kiyo 45
Type:
Etcher
Wafer Size:
Equipment Configuration:
- Polysilicon
- 4ch
- SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2
- Edwards STP XA2703CV
2008 Vintage
- 4ch
- SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2
- Edwards STP XA2703CV
2008 Vintage
Send BTG Message:
InquireAd Details
-
Added: July 26, 2024
-
Views: 8