Ulvac SOPHI 200 Ion Implanter

Asset # : 81547
Equipment Make: Ulvac
Equipment Model: SOPHI 200
Type: Ion Implanter
Wafer Size: 6"
Equipment Configuration: - Dose range (actual dose: 1010~1014 ions/cm2)
- Beam current (~500μA)
- Throughput: more than 100 pieces/h (6in)
Equipment Pictures:
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  • Added: July 23, 2024

  • Views: 43

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