Ulvac SOPHI 200 Ion Implanter
Asset # :
81547
Equipment Make:
Ulvac
Equipment Model:
SOPHI 200
Type:
Ion Implanter
Wafer Size:
6"
Equipment Configuration:
- Dose range (actual dose: 1010~1014 ions/cm2)
- Beam current (~500μA)
- Throughput: more than 100 pieces/h (6in)
- Beam current (~500μA)
- Throughput: more than 100 pieces/h (6in)
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Added: July 23, 2024
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Views: 43