Lam 2300 E 5 Kiyo Etcher
Asset # :
80594
Equipment Make:
Lam
Equipment Model:
2300 E 5 Kiyo
Type:
Etcher
Wafer Size:
Equipment Configuration:
- 3 Chamber + 1 Strip
- Loadport: TDK TAS300
- ATM Robot: Kawasaki P/N 3NT510B-A002
- TM Robot: Brooks 201600-294-0002
- Lam PCU
- Lam VIOP
- Lam Engenuity
- Lam ESC Power Supply
- Horiba Gas Box
- MKS He UPC
- MKS E28D-29237 Process Vacuum Gauge: 0.1 Tor
- Loadport: TDK TAS300
- ATM Robot: Kawasaki P/N 3NT510B-A002
- TM Robot: Brooks 201600-294-0002
- Lam PCU
- Lam VIOP
- Lam Engenuity
- Lam ESC Power Supply
- Horiba Gas Box
- MKS He UPC
- MKS E28D-29237 Process Vacuum Gauge: 0.1 Tor
Equipment Pictures:
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Added: June 24, 2024
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Views: 33