Nikon NSR 2205 i 11 C Stepper
Asset # :
80564
Equipment Make:
Nikon
Equipment Model:
NSR 2205 i 11 C
Type:
Stepper
Wafer Size:
Equipment Configuration:
- Resolution: 0.45um L&S
- Total Focus Deviation: 0.45um L&S
- Astigmatism: 0.35um L&S
- Inclination: 0.40um
- Lens Distortion: 0.55um
- Mag Control Accuracy: 0.25um
- Focus Control Accuracy: 0.2um
- Total Focus Deviation: 0.45um L&S
- Astigmatism: 0.35um L&S
- Inclination: 0.40um
- Lens Distortion: 0.55um
- Mag Control Accuracy: 0.25um
- Focus Control Accuracy: 0.2um
Equipment Pictures:
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Added: June 20, 2024
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Views: 30