Canon FPA 2500 i 2 Stepper
Asset # :
79714
Equipment Make:
Canon
Equipment Model:
FPA 2500 i 2
Type:
Stepper
Wafer Size:
6"
Equipment Configuration:
- Can be used with a 6” reticle wafer
- Numerical aperture of 0.54 / 0.45
- image field of 22 mm [(X)17mm x (Y)26mm]
- Printing wavelength of i-line (365 nm)
- Resolution of 0.45 μm
- Illumination lamp of 1.5 kW super-high-pressure mercury
- Illumination
- Numerical aperture of 0.54 / 0.45
- image field of 22 mm [(X)17mm x (Y)26mm]
- Printing wavelength of i-line (365 nm)
- Resolution of 0.45 μm
- Illumination lamp of 1.5 kW super-high-pressure mercury
- Illumination
Equipment Pictures:
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Added: May 24, 2024
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Views: 38