Axcelis / Fusion 200 PCU Photostabilizer
Asset # :
78857
Equipment Make:
Axcelis / Fusion
Equipment Model:
200 PCU
Type:
Photostabilizer
Wafer Size:
8"
Equipment Configuration:
- 3 Phase
- Single Chamber
- One-Step UV Bake Process
- Single Chamber
- One-Step UV Bake Process
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Added: April 24, 2024
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Views: 59