Axcelis / Eaton Nova NV 8200 Implanter
Asset # :
76725
Equipment Make:
Axcelis / Eaton Nova
Equipment Model:
NV 8200
Type:
Implanter
Wafer Size:
8"
Equipment Configuration:
- Energy config.: from 3 to 250keV (single); up to 750 keV (triple)
- Wafer size 200mm with holders for different wafers sizes
- Dose: > 1E11at/cm²
- Beam current: I < 1mA
- Gas lines:
- 4 process gas lines (BF2/PH3/AsH3/Hydrogen)
- 1 gas line (A
- Wafer size 200mm with holders for different wafers sizes
- Dose: > 1E11at/cm²
- Beam current: I < 1mA
- Gas lines:
- 4 process gas lines (BF2/PH3/AsH3/Hydrogen)
- 1 gas line (A
Equipment Pictures:
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Added: February 20, 2024
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Views: 440