Cymer ELS 6400 248 NM DUV Excimer Laser
Asset # :
76623
Equipment Make:
Cymer
Equipment Model:
ELS 6400
Type:
DUV Excimer Laser
Wafer Size:
Equipment Configuration:
- 248 NM
- New F2 trap
- Has CE mark
Includes the following modules:
- Module 143730 date 02/11/11
- Module 05-04555-01 date 0009
- Module 143731 date 27/04/11
- Module 05-11019-02 date 02/19/02
- Module 05-04556-01 date 0009
- Module 114125 date 12/19/0
- New F2 trap
- Has CE mark
Includes the following modules:
- Module 143730 date 02/11/11
- Module 05-04555-01 date 0009
- Module 143731 date 27/04/11
- Module 05-11019-02 date 02/19/02
- Module 05-04556-01 date 0009
- Module 114125 date 12/19/0
Equipment Video:
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Added: February 12, 2024
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Views: 617