ASML Twinscan AT 850 B Wafer Stepper
Asset # :
75800
Equipment Make:
ASML
Equipment Model:
Twinscan AT 850 B
Type:
Wafer Stepper
Wafer Size:
12"
Equipment Configuration:
- Sub Proc : KrF
- Material : Align
- Operating System : UNIX
- SMIF/FOUP : YES
- S/W version : 5.0.0 C
- RH type : IRIS (PPD)
- WH type : SMIF type
- IL type : UNICOM
- Workstation type : Sun NETRA V240
- Laser type : Cymer Laser
- Proc Module Specificat
- Material : Align
- Operating System : UNIX
- SMIF/FOUP : YES
- S/W version : 5.0.0 C
- RH type : IRIS (PPD)
- WH type : SMIF type
- IL type : UNICOM
- Workstation type : Sun NETRA V240
- Laser type : Cymer Laser
- Proc Module Specificat
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Added: January 2, 2024
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Views: 386