ASML PAS 5500/300 C Wafer Stepper Sold
Asset # :
75362
Equipment Make:
ASML
Equipment Model:
PAS 5500 / 300 C
Type:
Wafer Stepper
Wafer Size:
6"
Equipment Configuration:
- SW version: 8.9.0.c
- PC (Sun): Netra
- Chuck Type: SiC (LC)
- Light source (Cymer Laser): 5600 KrF
- CLEAR (auto chuck cleaning): N/A
- STARTSMART (overlay improvement): N/A
- DoseMapper (CD improvement): NO
- CPE (Correction per exposure): NO
- Test S
- PC (Sun): Netra
- Chuck Type: SiC (LC)
- Light source (Cymer Laser): 5600 KrF
- CLEAR (auto chuck cleaning): N/A
- STARTSMART (overlay improvement): N/A
- DoseMapper (CD improvement): NO
- CPE (Correction per exposure): NO
- Test S
Equipment Pictures:
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Added: December 4, 2023
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Views: 70