Ultratech LSA 100 A Wafer Stepper
Asset # :
75096
Equipment Make:
Ultratech
Equipment Model:
LSA 100 A
Type:
Wafer Stepper
Wafer Size:
12"
Equipment Configuration:
- Laser Spike Anneal (LSA)
- Process Chamber
- Cooling Chamber
- Laser
- Heat Exchanger
- AC Rack
- 115 VAC / 1 Phase / 50/60 Hz
- 2 wire + Ground
- 15 Amps FLA / 6 Amps Largest Load
- Process Chamber
- Cooling Chamber
- Laser
- Heat Exchanger
- AC Rack
- 115 VAC / 1 Phase / 50/60 Hz
- 2 wire + Ground
- 15 Amps FLA / 6 Amps Largest Load
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Added: November 13, 2023
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Views: 113