Axcelis / SEN NV GSD HE Implanter
Asset # :
75009
Equipment Make:
Axcelis / SEN
Equipment Model:
NV-GSD-HE
Type:
Implanter
Wafer Size:
Equipment Configuration:
- ATM Robot: SEN P/N:11 S 7452-14
- HV Power Supply
- Notch
- Load Lock Type
- HV Power Supply
- Notch
- Load Lock Type
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Added: November 7, 2023
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Views: 242