Nikon S 306 C
Asset # :
73000
Equipment Make:
Nikon
Equipment Model:
S 306 C
Type:
Scanner
Wafer Size:
Equipment Configuration:
-Resolution ≤ 100 nm
-NA 0.78
-Exposure source ArF excimer laser (193 nm wavelength)
-Reduction magnification 1:4
-Maximum exposure range 25 × 33 mm
-Overlap accuracy (EGA, |M| + 3σ) ≤ 20 nm
Equipment Pictures:
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Added: November 2, 2023
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Views: 16