Lam 2300 V 2 KIYO 45 Etcher

Asset # : 74686
Equipment Make: Lam
Equipment Model: 2300 V 2 KIYO 45
Type: Etcher
Wafer Size:
Equipment Configuration: - Chambers: KIYO 45 (2)
- Loadport: Brooks (3)
- Transfer Robot: Brooks
- Transfer Robot Arm: YES
- ATM Robot: YES
- Power: 208 Vac, 50/60 Hz, 272 Amps
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  • Added: October 24, 2023

  • Views: 460

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