Hitachi 8820 CD SEM
Asset # :
74510
Equipment Make:
Hitachi
Equipment Model:
S 8820
Type:
CD-SEM
Wafer Size:
6"
Equipment Configuration:
- Edwards nXDS-20i Dry Pump
Supported Options:
- Low Vacc
- Defect Inspection
- SECS
- Edge Roughness
- Reduced Scan
- Defect Type: KLA
- Image Database
- Save to DOS FD
- IP Read
Supported Options:
- Low Vacc
- Defect Inspection
- SECS
- Edge Roughness
- Reduced Scan
- Defect Type: KLA
- Image Database
- Save to DOS FD
- IP Read
Equipment Pictures:
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InquireAd Details
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Added: October 13, 2023
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Views: 236