Applied Materials Centura 5200 Epi Reactor
Asset # :
74521
Equipment Make:
Applied Materials
Equipment Model:
Centura 5200 Epi
Type:
Reactor
Wafer Size:
Equipment Configuration:
- 3 atmospheric epi chambers
- 1 cool down chamber
- Variable Speed Blower
- HP+ Robot
- Wide Body Loadlocks
- On-The-Fly Center Finder
- Accusett BMV system
- HSMS GEMSECS
- 2 mixed dopant supply lines
- TCS supply line
- Universal loadlock platform (20
- 1 cool down chamber
- Variable Speed Blower
- HP+ Robot
- Wide Body Loadlocks
- On-The-Fly Center Finder
- Accusett BMV system
- HSMS GEMSECS
- 2 mixed dopant supply lines
- TCS supply line
- Universal loadlock platform (20
Equipment Pictures:
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Added: October 11, 2023
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Views: 1152