Varian 3290 Sputtering System Sold
Asset # :
72554
Equipment Make:
Varian
Equipment Model:
3290
Type:
Sputtering System
Wafer Size:
6"
Equipment Configuration:
- Aluminum deposition
- 3 deposition modules with ConMag II sources
- Station 1: Pre Clean - Removed and now Blank (However, pre-clean power supplies are still present: Advanced Energy RF 10 S)
- Station 2: Dep Station, Argon, N2
- Station 3: Dep Station,
- 3 deposition modules with ConMag II sources
- Station 1: Pre Clean - Removed and now Blank (However, pre-clean power supplies are still present: Advanced Energy RF 10 S)
- Station 2: Dep Station, Argon, N2
- Station 3: Dep Station,
Equipment Pictures:
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Added: September 5, 2023
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Views: 400