ASM LPCVD
Asset # :
70040
Equipment Make:
ASM
Equipment Model:
Type:
LPCVD
Wafer Size:
4", 6"
Equipment Configuration:
- two tube systems capable of depositing polysilicon, silicon nitride and LTO
- uses dedicated quartz boats
- Tube 1: LPCVD of low temperature oxide
- Tube 2: LPCVD of Silicon Nitride / Polysilicon
- uses dedicated quartz boats
- Tube 1: LPCVD of low temperature oxide
- Tube 2: LPCVD of Silicon Nitride / Polysilicon
Equipment Pictures:
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Added: March 14, 2023
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Views: 107