Hitachi S 8800 CD SEM
Asset # :
68619
Equipment Make:
Hitachi
Equipment Model:
S 8800
Type:
CD-SEM
Wafer Size:
Equipment Configuration:
Known issues:
- Robot controller not working. Suspect issue with flash memory pcb.
- Beam quality - Image quality was grainy
- Intermittent issue with wafer loading from the notch alignment unit
- Needs a new tip installed
- HV controller pcb was remove
- Robot controller not working. Suspect issue with flash memory pcb.
- Beam quality - Image quality was grainy
- Intermittent issue with wafer loading from the notch alignment unit
- Needs a new tip installed
- HV controller pcb was remove
Equipment Pictures:
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Added: January 19, 2023
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Views: 122