Applied Materials P 5000 Metal Etcher
Asset # :
65802
Equipment Make:
Applied Materials
Equipment Model:
P 5000
Type:
Metal Etcher
Wafer Size:
8"
Equipment Configuration:
Main Process Modules:
– Chamber #A,#B Metal Etch, #D Strip
– Mark II Main Frame
– 29 Slot Storage Elevator
– Independent Helium Cooling
– Expanded VME
– Phase III Robot
– Phase II Cassette
Sub-Modules:
– AC remote frame
– Digital cables
– Analog
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Added: June 8, 2022
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Views: 175