E Beam Evaporator

With:
– 50KVA Transformer (Primary: 410V Delta, 70.4 Amps; Secondary: 220V Delta, 131 Amps)
– Beckhoff System PC (Windows 2000 + ANS Software)
– CTI 9600 Cryo Compressor
– Leybold TriVac  D16B Roughing Pump (2 off)
– Edwards E2M18 Roughing Pump
– Edwards E2M28 Roughing Pump
– Varian Turbo-V 550 Turbo Controller (Dealer Module)
– Varian Turbo-V 551 Navigator Turbo Pump (Dealer Module)
– Varian Turbo-V 301 Turbo Controller (Load Lock)
– Varian TurboVac TMP361C Turbo Pump (Load Lock)
– Varian Turbo-V 301 Turbo Controller (Buffer)
– Brooks MagnaTran 7 Robot [and Teach Pendant] (Dealer)
– Spares of PSUs, Shields, Vacuum Gauges