KLA Tencor Surfscan SP 3 Particle Measurement

Asset # : 65019

Equipment Make: KLA-Tencor

Equipment Model: Surfscan SP 3

Type: Particle Measurement

Wafer Size: 12"

Equipment Configuration:

– IMC (image computer) 1 unit
– 1 heat exhaust blower unit
– Handling Options:
– Vacuum Chuck Triple FIMS handler (3 x 300 mm) 1 set
Software:
– NGS Version:6.20.6360
– IMC Version: 2.30.6360
Standard Options
– Oblique Incident 1 set
– ST mode 1 set
– 2mm

Equipment Pictures: