Leybold APS 1104 Optical Coating Machine

Asset # : 64804
Equipment Make: Leybold
Equipment Model: APS 1104
Type: Optical Coating Machine
Wafer Size:
Equipment Configuration: - Substrate Dome Size: 1100-1200MM
- Ion Source: APS Plasma Source
- Control System: K1 Main control unit,K2 Control unit
- Film Thickness Monitor: 6" Quartz crystal film thickness monitor
- EB Guns: (2) EB-Gun ESV14 / EB-Gun HVTen
- Substrate Heating
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Equipment Pictures:

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Ad Details

  • Added: April 1, 2022

  • Views: 631

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