Gasonics-L 3200-Asher-64441

Price: $27,400

Asset # : 64441
Make : Gasonics
Model : L 3200
Type : Asher
Wafer Size : 4", 6"
Configuration : - 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roughing pumps and pressure control systems (throttle valves) - Electronics control system - Automated robotic wafer handler - The Asher employs two modes of process termination – end point detection and end of process time - Missing ADE 350 Robot - can be run by manually loading chamber 1 wafer at a time

$27,400.00

Category: General