KLA Tencor 5300 Overlay Measurement System

Asset # : 64443
Equipment Make: KLA-Tencor
Equipment Model: 5300
Type: Overlay Measurement System
Wafer Size:
Equipment Configuration:

Missing:
– Computer – HDD
– Motion controller
– Pre aligner
– Robot controller
– Finger
– Mapper
– Load Port #1,2
– SBC controller
– AMS
– Pneumatic panel (air/vacuum)
– Sutter
– Z PZT
– PDA
– Interface board
– Flotation controller
– Lamp housing
– PM tar

Equipment Pictures:

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Ad Details

  • Added: March 24, 2022

  • Views: 264

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