Ulvac SME 200 J Sputtering System

Asset # : 64135

Equipment Make: Ulvac

Equipment Model: SME 200 J

Type: Sputtering System

Wafer Size:

Equipment Configuration:

Current Target:
– PM2: PT18-0008
– PM3: NH18-4049
– PM5: NH18-4023
– PM6: NH18-4022
Turbo Controller / Target Class:
– PM2: EI-D1003M
– PM3: EI-V04M (2304)
– PM4: EI-D303M
– PM5: EI-V04M (2304)
– PM6: RI-V04M (2304)
– LL: EI-D203M
– TO: EI-D1003M
Turbo