Hitachi S 4800 II Scanning Electron Microscope (SEM)

Asset # : 62598

Equipment Make: Hitachi

Equipment Model: S 4800 II

Type: SEM

Wafer Size: 8"

Equipment Configuration:

– Secondary electron image resolution:
– 1.0nm (15kV, WD=4mm)
– 1.4nm (1kV, WD=1.5mm, Deceleration mode)
– 2.0nm (1kV, WD-1.5mm, Normal mode)
Magnification:
– LM mode: 20 ~ 2,000X
– HM mode: 100 ~ 800,000X
Specimen Stage:
– Stage Motorization: 5 a

Equipment Pictures: