Evatec BAP 801 E Beam Evaporator
Asset # :
62341
Equipment Make:
Evatec
Equipment Model:
BAP 801
Type:
E-Beam Evaporator
Wafer Size:
Equipment Configuration:
– Plasma source missing
– Cryo Pumped
Power Supply:
– Triode Tube
– High Voltage Min: 6kV
– High Voltage Max: 10kV
– No. of Guns Controlled: 2
– Electron Source Type: Four Pocket
– Gas Inputs: 2
– Film Thickness Monitor
– Residual Gas Analyzer
Equipment Pictures:
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Added: December 1, 2021
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Views: 137