Zygo Interferometer

Asset # : 61811

Equipment Make: Zygo

Equipment Model:

Type: Interferometer

Wafer Size:

Equipment Configuration: - Laser: Type: frequency stabilized Helium-Neon laser with fiber
optic output
- Wavelength: 1550 nanometers
- Maximum Output Power: <1 milliwatt
- Output Power at Instrument Aperture: ≤1 milliwatt
- Test Beam Diameter: 3 mm
- Coherence Length: ≥10 meters
Objectives:
- Mounting: Dovetail
- Type: Infinity Corrected SLWD Mag. N.A. Working Dist.
- 50X 0.45(1) 13.80 mm
- 100X 0.73 4.70 mm
- (1) 0.38 NA useable
Z-Drive (Focus) Stage:
- Motor: DC brushless, microstepper
- Drive: leadscrew
- Range: 6 in. (152 mm)
- Resolution: 4 μin. (0.1 μm)
- X/Y Stage:
- Motor: DC brushless, microstepper
- Drive: leadscrew
- Range: 6 in. (152 mm)
- Resolution: 4 μin. (0.1 μm)
- Maximum Velocity: 0.50 in/sec (12.7 mm/sec)
Sample Viewing:
- Camera Size: 640 x 480 pixels maximum
- Viewing: 9 in. monochrome video monitor and MetroPro on-screen
display
- Focus: manual or automatic
Test Part Characteristics:
- Type: nominally spherical surfaces (using objective) and flat
surfaces(without objective)
- Radius of Curvature: from 100 μm to 3 mm
- Reflectivity: 4 to 100 %
- Utility Requirements:
- Electrical: 90 – 250 VAC, 50/60 Hz (for laser power supply, motor
driver assembly, video monitor, and computer)
- The MicroLUPI receives +12 VDC from Zygo Controller Board
installed in the computer.
- Compressed Air (for Vibration Isolation Table):60 psi minimum,
with 1/4 in. input
Operating Environment:
- Temperature: 15° to 30°C (59° to 86° F)
- Rate of Temperature Change: <1.0°C/15 min.
- Humidity: 5 to 95% relative, noncondensing
- Vibration: Frequency Isolation 1Hz < freq < 120Hz

Equipment Pictures: