Axcelis NV 8200 P MS Implanter Sold
Asset # :
60494
Equipment Make:
Axcelis
Equipment Model:
NV 8200 P
Type:
MS Implanter
Wafer Size:
8"
Equipment Configuration:
– Type: NV8200P Dose2 Block3
– Energy Config: 0 – 250Kv Midcurrent
– CE-Conformity: Yes
– Cryo-Compressor: CTI 9650 Low-Voltage (QTY
– Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C
– Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250
– Clamp-Type: E-Ch
Equipment Pictures:
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Added: June 21, 2021
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Views: 892