Novellus Concept Two Sequel CVD Cluster Tool Sold
Asset # :
60351
Equipment Make:
Novellus
Equipment Model:
Concept Two Sequel
Type:
CVD Cluster Tool
Wafer Size:
Equipment Configuration:
Includes:
– 2ea oxide deposition process chambers
– Power cabinet w/ 2ea Advanced Energy PDX-1400 power supplies, ENI OEM-50 XL RF generator, ENI OEM-50 RF generator
– Power control cabinet, 208V, 3ph, 60Hz
– 2ea BOC Edwards QDP80 vacuum pump w/ QMB1200 b
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Added: June 9, 2021
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Views: 201