Evatec / Balzers BAK 1401 Evaporator Sold
Asset # :
58099
Equipment Make:
Balzers / Evatec
Equipment Model:
BAK 1401
Type:
Evaporator
Wafer Size:
6"
Equipment Configuration:
– Right Hand Open System
– (QTY: 2) Six pocket E-Guns
– 2 sources
– Holds Approx 48 6″ wafers
– QCM and Coptical In-Situ thickness monitoring system
– Paramount 6013 6kW RF Gen
– Gases: O2, HPN, Argon, N2, and one open
Pumping System:
– CTI Cryogenics on
Equipment Pictures:
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Added: December 23, 2020
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Views: 1233