ASM Epsilon 3200 RP Epitaxial Silicon Deposition (EPI) System Sold
Asset # :
56666
Equipment Make:
ASM
Equipment Model:
Epsilon 3200
Type:
RP Epitaxial Silicon Deposition (EPI) System
Wafer Size:
12"
Equipment Configuration:
– Single Chamber
– Process: SiGe
– CIM: SECS/GEM
– FOUP (2)
– with Robot
– Options: Dakota GIB (2)
– Edwards Scrubber
– Not Included: Quartz Kit, RP Stack Kit
Equipment Pictures:
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Added: October 9, 2020
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Views: 1026