Applied Materials 5500 Endura–
Asset # :
56336
Equipment Make:
Applied Materials
Equipment Model:
5500 Endura
Type:
Wafer Size:
12"
Equipment Configuration:
– Wafer Shape: Flat
– 208Vac
– 50/60Hz
– 329A
– 118KVA
Chamber B:
– Type: Cooldown
– Heater / Cathode Cooling: PCW
– Clear Lid
Chamber 1 & 2:
– Type: AL PVD
– Process: AL SLAB
– Susceptor / Pedestal: HTESC
– Pump: Sumitomo KZ-8L3SL
– Heater / Cathode Cool
Equipment Pictures:
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Added: October 9, 2020
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Views: 617