Hitachi S 7800 H Critical Dimension Scanning Electron Microscope (CD SEM) Sold

– Automatic cassette to cassette wafer loading
– Resolution: 5 nm at 1 kV
– Throughput: 5 Wafers/Hour
– Stage movable range:
— X: 0 ~ 200 mm
— Y: 0 ~ 200 mm
— Z: 4 ~ 12 mm
— R: 0 ~ 360° 
— T: 0 ~ 60°
– OM/SEM image is not properly disp