Balzers LLS 900 Sputtering System
Asset # :
48085
Equipment Make:
Balzers
Equipment Model:
LLS 900
Type:
Sputtering System
Wafer Size:
Equipment Configuration:
– 7 chambers
– 4 sputter stations and 1 etch station
– Control rack
– Generator lack
– Polycold 650 chiller unit
– Spare parts, pumps, electronic parts, manuals
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Added: June 5, 2019
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Views: 398