Lam Rainbow 4428 XL Poly Nitride Etcher Sold

Asset # : 47106

Equipment Make: Lam

Equipment Model: Rainbow 4428 XL

Type: Poly Nitride Etcher

Wafer Size: 8"

Equipment Configuration:

– Integrated SMIF
– Software Version: E1.5-released
– CIM
– Main Mini Environment Platform
– Main CPU & ACDC Module
– (QTY: 2) Built-in Asyst 2200 Indexers
– Wafer Notch Alignment with Spatula
– (QTY: 2) Harmonic Drive with Wafer Handler
– Gap System
– RF

Equipment Pictures: