Kokusai Quixace Ultimate Vertical Low Pressure Chemical Vapor Deposition (LPCVD)

– MT-TiN
– Cartridge Heater – D4EX22250, RHC2 Heater
– Number of control zone, 5 zones
– Heater element material – KANTHAL APM
– Maximum heating temperature range – 1050 degC (in Furnace)
– Flat zone length – 800mm (±2.0 degC at 800 degC)
– Main Controlle