Edwards Auto 306 Cryo E Beam Evaporator
Asset # :
45632
Equipment Make:
Edwards
Equipment Model:
Auto 306 Cryo
Type:
E-Beam Evaporator
Wafer Size:
Equipment Configuration:
- Custom sample rotation head
- Four pocket E-beam station
- Thin Film monitor (IL820)
- Preclean station
- Pre-heat station
- Oxford Cryosystem’s cryopump
- E8DP12 Scroll pump
- FL400 Chamber
- RF7 Flip control assembly
- Four pocket E-beam station
- Thin Film monitor (IL820)
- Preclean station
- Pre-heat station
- Oxford Cryosystem’s cryopump
- E8DP12 Scroll pump
- FL400 Chamber
- RF7 Flip control assembly
Equipment Pictures:
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Added: October 9, 2020
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Views: 162