ASML Twinscan XT 1250 D ArF Scanner Sold

Asset # : 36999

Equipment Make: ASML

Equipment Model: Twinscan XT 1250 D

Type: ArF Scanner

Wafer Size: 12"

Equipment Configuration:

– 193nm
– Track Pre-warning signal (APR)s: APR enabled
– Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track
– INPUT/OUTPUT conflicts enabled
– Active wafer release for dry WSs: FALSE
– Closing disk types: No closing disk present
– S

Equipment Pictures: