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Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace

Hitachi Kokusai DD 823 V Vertical Diffusion Furnace

Asset #: 134660

Make: Hitachi Kokusai

Model: DD 823 V

Wafer Sizes: 8 inch

Last Confirm Date: June 13, 2025

Hitachi Kokusai DD 823 V Vertical Diffusion Furnace, 8"
- Process: H2 Anneal
- System Layout: Main, Utility
- No Side Maintenance
- System Paint Color: Ivory
- Furnace Front Surface Finish: Painted
- Rapid Cooling Unit Not Installed
- N2 Load Lock Not Installed
- O2 Analyzer installed (LC-750)
- Cassette I/O Type: Normal I/O
- SMIF Not installed
- AVG Compatibility: Unable
- System Main Controller: CX 2003 A
- Mechanical Controller: CX 1215-1, 1215-2
- Sequence Controller: CX 1309 A
- Gas Controller: CX 2003 A
- Gas Flow Chart Panel: Installed
- Operation Panel: Installed
- Signal Tower / Colors: Not installed
- Furnace Temperature Controller: CQ 1500 A
- Furnace Over-temp Detector: DN 130 LZ 3
- Gas Detector: Riken Keiki GD-D 8 V
- Detecting Gas: H2
- Host Communications: Yes
- User Host Computer I/F: HSMS
- Manual (Drawing, Parts list, etc.): Not Included
Gas System:
- Process Gas: N2, H2
- Basic Style: Integrated Gas System (Fujikin)
- Manual Valve: Fujikin
- Filter: Millipore (Ni)
- Regulator: Yakata ENG
- MFC: STEC / SEC 7330, 7350, 7340
- PT Sensor: Temtech / NPS 4200 OP
- Check Valve: NUPRO
- Baking System: Not Installed
- Liquid Source Auto-Refill: Not installed
- Burn Controller: Not Installed
- Veporizer: Not Installed
Vacuum / Exhaust System:
- Pump: Not installed
- Pressure Control Valve: Not Installed
- pressure Sensor: Not Installed
-Trap: Not Installed
- Gas Coolr: Not Installed
Wafer Cassette / Handling:
- Auto Wafer Aligner: Installed
- Wafer Qty in Cassette: 25
- Cassette Storage Qty: 21
- Fork Type: 1 + 4 (VAC)
- Fork-Wafer Presence Sensor: Installed
- Fork-Variable Pitch: Installed
- Magnetic Seal Rotation: Not Installed
1995 Vintage

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